Project background

Magnetron sputtering targets are mainly used in the electronics and information industries, such as integrated circuits, information storage, liquid crystal displays, laser memories, electronic control devices, etc.; they can also be used in the field of glass coating; they can also be used in wear-resistant materials, high temperature Corrosion resistance, high-end decorative products and other industries. Magnetic permeability can be used as an effective indicator to evaluate the magnetic permeability of magnetic targets. There is no corresponding industry standard for its test method, which greatly restricts the research and development, production and industrial production of domestic magnetic sputtering targets.

Solution

1. Test equipment: CIM-3140RMT magnetic permeability measuring device CIM-3140RMT magnetic permeability measuring device is a sample magnetic permeability measuring device, mainly used for magnetic sputtering targets including PTFmean, PTFwarp, PTFrange, %PTFmax, %PTFmin, % Measure parameters such as PTFmean, %PTFwarp, %PTFstdev, and perform statistical analysis on the test results. PTF curves and %PTF curves can be drawn. It has functions such as file management, testing and data (graphic) output, which can meet users' needs for testing, data (report) output and data management of magnetic sputtering targets.

2. Equipment characteristics

⑴ The RMTest magnetic permeability measurement system is green software and does not require cumbersome installation processes.

⑵ The measurement software runs under Windows XP or Win 7 operating system, complies with Windows software specifications, and is intuitive and simple to operate.

⑶ Use a transverse probe to measure the magnetic permeability of the sample surface.

⑷ The magnetometer has an automatic clearing function and can clear the zero point of the meter head with one click.

⑸ The magnetic field test range can be selected in the software interface, without the need to switch the range gears by manual buttons.

⑹ The test results include PTFmean, PTFwarp, PTFrange, %PTFmax, %PTFmin, %PTFmean, %PTFwarp, etc.

⑺ Multiple sets of data can be imported for comparison of multiple radius curves.

⑻ The test results can be displayed on the PTF or %PTF coordinates by double-clicking the waveform to bring up the single point capture function. The relative angle and magnetic field strength value of the point currently selected by the mouse can be displayed at the bottom of the software interface.

⑼ The instrument comes with a level.

⑽ Support various types of inkjet or laser printers, and can directly print test reports.

⑾ Colored test reports can be sent directly via E-mail.

⑿ It has a database function that can output test data to EXCEL to facilitate analysis of test results.

⒀ The test report can be converted (saved) into a picture file to facilitate illustrations in the paper.

3. Main technical parameters

4. Software interface

5. Test curve